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Applications
Wafer Packing/Unpacking
Automated Wafer Pack and Unpack Tool
Challenge

The many different ways to pack/unpack silicon wafers for shipping or manufacturing present challenges to automating the process. The isolation material separating adjacent wafers may change. An OEM of wafer sorting and packing tools wanted to build a new machine that can handle “change on the fly” of the isolation materials. The challenge here was to come up with either a device or a technique that could place or remove any cleanroom surface material, even those that are porous or irregular in surface, without changing the fixture.


Solution

We proposed a Non-Contact Transfer (NCT), which uses the Bernoulli principal of using positive pressure to create the lifting force to pick up material. The approach is simpler and more effective than using a vacuum since it can handle the widest range of materials without concern for surface texture and the ability to form a vacuum seal. The NCT can pick up corrugated paper and porous materials.


Result

The NCT-based pickup mechanism gives the pack/unpack tool wide latitude in the range of materials it can handle automatically.
All Applications
Wafer Lift Assembly 1
Wafer Lift Assembly 2
Wafer Packing/Unpacking
Wet Bench Robot
CMP Brush Box
Off-Line Binner
Tray Transfer
Back-End Inspection
Metrology/Inspection
Scanning Electron Microscopy
Cleanroom Structures
Wire Bonding
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