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Applications
Wire Bonding
Wire Bonding Semiconductor Productivity
Bosch Rexroth draws on its experience to build state-of-the-art control solutions and precision engineered assemblies proven to deliver micrometer-scale accurate bonding motion -- stable, repeatable and able to meet the demand for non-stop, 24/7 wire bonding throughput.


Increase Productivity
  • Custom development of specific bond-head control algorithms and support for multiple motor types, feedback devices and software interfaces
  • High precision profiled rails provide accurate positioning and reduced X, Y and Z axis movement compared to conventional profiled rails
  • High performance pneumatic valves increase process efficiency
Enhance Reliability
  • High Precision Ball Rail reduces incidental movement in X, Y & Z axes by 60%
  • Integrated motion control interfaces reduce cabling points of failure
  • Diagnostics allow quick views into motion control system elements to reduce downtime and Mean Time To Repair
Boost Throughput
  • High-performance control algorithms support ultra-fast interpolated closed-loop motion specific to bonding applications
  • Tight motion and I/O synchronization enable faster bonding cycles
  • Pneumatic valves are designed to reduce cycle times through fast response times, high flow rates, integrated electronics and precise operation
  • Ball rail linear guides provide speeds up to 5 m/s and acceleration up to 50g; miniature ball rails provide speeds up to 3 m/s and acceleration up to 25g.
Reduce TCO
  • Interchangeable linear motion components make service easier and help control costs
  • Flexible, modular motion control systems can be fully tested and assembled at lower costs near to final assembly
Applications
Wafer Lift Assembly I
Wafer Lift Assembly II
Wafer Packing/Unpacking
Wet Bench Robot
CMP Brush Box
Tray Transfer
Off-Line Binner
Back-End Inspection
Metrology/Inspection
Scanning Electron Microscopy
Cleanroom Structure
Wire Bonding
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